Nanoparticle production from HMDSO in atmospheric pressure argon-oxygen plasma

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Author
Wallimann, Roger
Roth, Christian
Rudolf von Rohr, Philipp
Date
2018-05
Type
  • Journal Article
Publication status
published
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Journal / series
Plasma Processes and Polymers
Volume
15(5)
Pages / Article No.
e1700202
Publisher
Wiley
Subject
atmospheric pressure filamentary discharge (APFD); ATR‐FTIR; HMDSO; nanostructures; SEM
Organisational unit
03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)  
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