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dc.contributor.author
Neels, Antonia
dc.contributor.author
Dommann, Alex
dc.contributor.author
Niedermann, Philippe
dc.contributor.author
Falub, Claudiu
dc.contributor.author
von Känel, Hans
dc.contributor.editor
Zschech, Ehrenfried
dc.contributor.editor
Ogawa, Shinichi
dc.contributor.editor
Ho, Paul S.
dc.date.accessioned
2017-06-09T08:30:33Z
dc.date.available
2017-06-09T08:30:33Z
dc.date.issued
2010
dc.identifier.isbn
978-0-7354-0855-5
dc.identifier.isbn
0-7354-0855-6
dc.identifier.other
10.1063/1.3527115
dc.identifier.uri
http://hdl.handle.net/20.500.11850/27595
dc.language.iso
en
dc.publisher
American Institute of Physics
dc.title
Advanced Stress, Strain And Geometrical Analysis In Semiconductor Devices
dc.type
Conference Paper
ethz.book.title
Stress-induced phenomena in metallization
ethz.journal.title
AIP Conference Proceedings
ethz.journal.volume
1300
ethz.pages.start
114
ethz.pages.end
119
ethz.event
11th International Workshop on Stress-Induced Phenomena in Metallization 2010
ethz.event.location
Bad Schandau, Germany
ethz.event.date
April 12-14, 2010
ethz.identifier.nebis
006442657
ethz.publication.place
Melville, N.Y.
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich, direkt::00012 - Lehre und Forschung, direkt::00007 - Departemente, direkt::02010 - Departement Physik / Department of Physics::02505 - Laboratorium für Festkörperphysik (LFP) / Laboratory for Solid State Physics (LFP)::03569 - Batlogg, Bertram (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich, direkt::00012 - Lehre und Forschung, direkt::00007 - Departemente, direkt::02010 - Departement Physik / Department of Physics::02505 - Laboratorium für Festkörperphysik (LFP) / Laboratory for Solid State Physics (LFP)::03569 - Batlogg, Bertram (emeritus)
ethz.date.deposited
2017-06-09T08:30:48Z
ethz.source
ECIT
ethz.identifier.importid
imp59364d7c1bd9991617
ethz.ecitpid
pub:46441
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-24T08:52:32Z
ethz.rosetta.lastUpdated
2020-02-14T07:25:01Z
ethz.rosetta.versionExported
true
ethz.COinS
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