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dc.contributor.author
Gorelick, Sergey
dc.contributor.author
Vila-Comamala, Joan
dc.contributor.author
Guzenko, Vitaliy
dc.contributor.author
Mokso, Rajmund
dc.contributor.author
Stampanoni, Marco
dc.contributor.author
David, Christian
dc.date.accessioned
2017-06-09T08:58:55Z
dc.date.available
2017-06-09T08:58:55Z
dc.date.issued
2010
dc.identifier.issn
0167-9317
dc.identifier.issn
1873-5568
dc.identifier.other
10.1016/j.mee.2009.11.091
dc.identifier.uri
http://hdl.handle.net/20.500.11850/28934
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
High aspect ratio
dc.subject
PMMA
dc.subject
Electron beam lithography
dc.subject
X-ray optics
dc.subject
Hard X-rays
dc.subject
Au electroplating
dc.title
Direct e-beam writing of high aspect ratio nanostructures in PMMA: A tool for diffractive X-ray optics fabrication
dc.type
Conference Paper
ethz.journal.title
Microelectronic Engineering
ethz.journal.volume
87
ethz.journal.issue
5-8
ethz.journal.abbreviated
Microelectron. eng.
ethz.pages.start
1052
ethz.pages.end
1056
ethz.event
35th International Conference on Micro- and Nano-Engineering (MNE)
ethz.event.location
Ghent, Belgium
ethz.event.date
September 28 - October 1, 2009
ethz.notes
Received 11 September 2009, Revised 13 November 2009, Accepted 17 November 2009, Available online 23 November 2009.
ethz.identifier.nebis
000022878
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::02631 - Institut für Biomedizinische Technik / Institute for Biomedical Engineering::03817 - Stampanoni, Marco F.M. / Stampanoni, Marco F.M.
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::02631 - Institut für Biomedizinische Technik / Institute for Biomedical Engineering::03817 - Stampanoni, Marco F.M. / Stampanoni, Marco F.M.
ethz.date.deposited
2017-06-09T08:59:21Z
ethz.source
ECIT
ethz.identifier.importid
imp59364d919801523061
ethz.ecitpid
pub:48279
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-12T18:36:34Z
ethz.rosetta.lastUpdated
2020-02-14T07:32:45Z
ethz.rosetta.versionExported
true
ethz.COinS
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