Dopant clustering and diffusion in silicon
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Date
2010Type
- Monograph
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publishedExternal links
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Journal / series
Series in microelectronicsVolume
Publisher
Hartung-GorreOrganisational unit
03228 - Fichtner, Wolfgang
Notes
See also: http://e-citations.ethbib.ethz.ch/view/pub:53026. Zugl. Diss. ETH 19255.More
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