Crystal damage analysis of implanted AlxGa1-xN (0 ≤ x ≤ 1) by ion beam techniques
Publication status
publishedExternal links
Journal / series
Surface and Coatings TechnologyVolume
Pages / Article No.
Publisher
ElsevierSubject
Implantation; Damage; AlGaN alloys; Ion beam techniquesOrganisational unit
08619 - Labor für Ionenstrahlphysik (LIP) / Laboratory of Ion Beam Physics (LIP)
Funding
317169 - Supporting Postgraduate Research with Internships in Industry and Training Excellence (EC)
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