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dc.contributor.author
Faye, Djibril N.
dc.contributor.author
Döbeli, Max
dc.contributor.author
Wendler, Elke
dc.contributor.author
Brunner, Frank
dc.contributor.author
Weyers, Markus
dc.contributor.author
Magalhães, Sérgio
dc.contributor.author
Alves, Eduardo
dc.contributor.author
Lorenz, Katharina
dc.date.accessioned
2018-11-27T14:43:06Z
dc.date.available
2018-11-09T06:00:48Z
dc.date.available
2018-11-27T14:43:06Z
dc.date.issued
2018-12-15
dc.identifier.issn
0257-8972
dc.identifier.issn
1879-3347
dc.identifier.other
10.1016/j.surfcoat.2018.01.020
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/302554
dc.language.iso
en
en_US
dc.publisher
Elsevier
en_US
dc.subject
Implantation
en_US
dc.subject
Damage
en_US
dc.subject
AlGaN alloys
en_US
dc.subject
Ion beam techniques
en_US
dc.title
Crystal damage analysis of implanted AlxGa1-xN (0 ≤ x ≤ 1) by ion beam techniques
en_US
dc.type
Journal Article
dc.date.published
2018-01-09
ethz.journal.title
Surface & coatings technology
ethz.journal.volume
355
en_US
ethz.journal.abbreviated
Surf. coat. technol.
ethz.pages.start
55
en_US
ethz.pages.end
60
en_US
ethz.grant
Supporting Postgraduate Research with Internships in Industry and Training Excellence
en_US
ethz.identifier.wos
ethz.identifier.scopus
ethz.publication.place
Amsterdam
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02010 - Dep. Physik / Dep. of Physics::02532 - Institut für Teilchen- und Astrophysik / Inst. Particle Physics and Astrophysics::08619 - Labor für Ionenstrahlphysik (LIP) / Laboratory of Ion Beam Physics (LIP)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02010 - Dep. Physik / Dep. of Physics::02532 - Institut für Teilchen- und Astrophysik / Inst. Particle Physics and Astrophysics::08619 - Labor für Ionenstrahlphysik (LIP) / Laboratory of Ion Beam Physics (LIP)
ethz.grant.agreementno
317169
ethz.grant.fundername
EC
ethz.grant.funderDoi
10.13039/501100000780
ethz.grant.program
FP7
ethz.date.deposited
2018-11-09T06:00:51Z
ethz.source
SCOPUS
ethz.eth
yes
en_US
ethz.availability
Metadata only
en_US
ethz.rosetta.installDate
2018-11-27T14:43:08Z
ethz.rosetta.lastUpdated
2021-02-15T02:41:24Z
ethz.rosetta.versionExported
true
ethz.COinS
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