Stability of the hydrophilic behavior of oxygen plasma activated SU-8

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Author
Walther, Ferdinand
Davydovskaya, Polina
Zücher, Stefan
Kaiser, Michael
Herberg, Helmut
Gigler, Alexander M.
Stark, Robert W.
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Date
2007
Type
  • Journal Article
Publication status
published
External links
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Journal / series
Journal of micromechanics and microengineering
Volume
17(3)
Pages
524 - 531
Publisher
IOP Publishing
Organisational unit
03389 - Spencer, Nicholas
Notes
Received 23 November 2006, In final form 10 January 2007, Published online 9 February 2007.
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