Stability of the hydrophilic behavior of oxygen plasma activated SU-8
Metadata only
Date
2007Type
- Journal Article
ETH Bibliography
yes
Altmetrics
Publication status
publishedExternal links
Journal / series
Journal of Micromechanics and MicroengineeringVolume
Pages / Article No.
Publisher
IOP PublishingOrganisational unit
03389 - Spencer, Nicholas (emeritus) / Spencer, Nicholas (emeritus)
Notes
Received 23 November 2006, In final form 10 January 2007, Published online 9 February 2007.More
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ETH Bibliography
yes
Altmetrics