- Journal Article
Rights / licenseIn Copyright - Non-Commercial Use Permitted
We probe the electron attachment in hexafluoropropylene oxide, C3F6O, a gas widely used in plasma technologies. We determine the absolute electron attachment cross section using two completely different experimental approaches: (i) a crossed-beam experiment at single collision conditions (local pressures of 5x10-4 mbar) and (ii) a pulsed Townsend experiment at pressures of 20 - 100 mbar. In the later method, the cross sections are unfolded from the electron attachment rate coefficients. The cross sections derived independently by the two methods are in very good agreement. We additionally discuss the dissociative electron attachment fragmentation patterns and their role in the radical production in industrial HFPO plasmas. Show more
Journal / seriesThe Journal of Chemical Physics
Pages / Article No.
PublisherAmerican Institute of Physics
Organisational unit03869 - Franck, Christian / Franck, Christian
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