Deposition of SiOx diffusion barriers on flexible packaging materials by PECVD - Research Collection

Metadata only

Author

Bieder, Andrea

Grüniger, A.

Rudolf von Rohr, Philipp

Date

2005-10

Type

Conference Paper

Citations

Cited 69 times in Web of Science

Cited 82 times in Scopus

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1016/j.surfcoat.2005.02.004

Journal / series

Surface & coatings technology

Volume

200(1-4)

Pages / Article No.

928 - 931

Publisher

Elsevier

Event

9th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, September 13-17, 2004

Subject

Silicon oxide; Diffusion barrier; PECVD; Water vapor permeability; RF mode; Dual mode

Organisational unit

03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)

Notes

Available online 31 March 2005.

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Citations

Cited 69 times in Web of Science

Cited 82 times in Scopus

ETH Bibliography

yes

Altmetrics