Deposition of SiOx diffusion barriers on flexible packaging materials by PECVD
Metadata only
Date
2005-10Type
- Conference Paper
Citations
Cited 79 times in
Web of Science
Cited 88 times in
Scopus
ETH Bibliography
yes
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Publication status
publishedExternal links
Journal / series
Surface & coatings technologyVolume
Pages / Article No.
Publisher
ElsevierEvent
Subject
Silicon oxide; Diffusion barrier; PECVD; Water vapor permeability; RF mode; Dual modeOrganisational unit
03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
Notes
Available online 31 March 2005.More
Show all metadata
Citations
Cited 79 times in
Web of Science
Cited 88 times in
Scopus
ETH Bibliography
yes
Altmetrics