Deposition of SiOx diffusion barriers on flexible packaging materials by PECVD - Research Collection

Metadata only

Autor(in)

Rudolf von Rohr, Philipp

Datum

2005-10

Typ

Conference Paper

Zitate

79 Zitate in Web of Science

87 Zitate in Scopus

ETH Bibliographie

yes

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Publikationsstatus

published

Externe Links

https://doi.org/10.1016/j.surfcoat.2005.02.004

Zeitschrift / Serie

Surface & coatings technology

Band

200(1-4)

Seiten / Artikelnummer

928 - 931

Verlag

Elsevier

Konferenz

9th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, September 13-17, 2004

Thema

Silicon oxide; Diffusion barrier; PECVD; Water vapor permeability; RF mode; Dual mode

Organisationseinheit

03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)

Anmerkungen

Available online 31 March 2005.

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Zitate

79 Zitate in Web of Science

87 Zitate in Scopus

ETH Bibliographie

yes

Altmetrics