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dc.contributor.author
Bieder, Andrea
dc.contributor.author
Grüniger, A.
dc.contributor.author
Rudolf von Rohr, Philipp
dc.date.accessioned
2017-06-09T09:49:42Z
dc.date.available
2017-06-09T09:49:42Z
dc.date.issued
2005-10
dc.identifier.issn
0257-8972
dc.identifier.issn
1879-3347
dc.identifier.other
10.1016/j.surfcoat.2005.02.004
dc.identifier.uri
http://hdl.handle.net/20.500.11850/31322
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
Silicon oxide
dc.subject
Diffusion barrier
dc.subject
PECVD
dc.subject
Water vapor permeability
dc.subject
RF mode
dc.subject
Dual mode
dc.title
Deposition of SiOx diffusion barriers on flexible packaging materials by PECVD
dc.type
Conference Paper
ethz.journal.title
Surface & coatings technology
ethz.journal.volume
200
ethz.journal.issue
1-4
ethz.journal.abbreviated
Surf. coat. technol.
ethz.pages.start
928
ethz.pages.end
931
ethz.event
9th International Conference on Plasma Surface Engineering
ethz.event.location
Garmisch-Partenkirchen, Germany
ethz.event.date
September 13-17, 2004
ethz.notes
Available online 31 March 2005.
ethz.identifier.wos
ethz.identifier.scopus
ethz.identifier.nebis
000035352
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik (ehem.) / Institute of Process Engineering (form)::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik (ehem.) / Institute of Process Engineering (form)::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.date.deposited
2017-06-09T09:50:05Z
ethz.source
ECIT
ethz.identifier.importid
imp59364dbd200c392658
ethz.ecitpid
pub:51629
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-14T18:23:19Z
ethz.rosetta.lastUpdated
2019-02-02T05:18:24Z
ethz.rosetta.exportRequired
true
ethz.rosetta.versionExported
true
ethz.COinS
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