Integrated chemical microsensor systems in CMOS-technology

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Author
Hierlemann, Andreas
Date
2005
Type
  • Conference Paper
Publication status
published
External links
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Book title
Digest of technical papers : Transducers’05 Seoul, Korea - The 13th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages / Article No.
1134 - 1137
Publisher
IEEE Operations Center, 2005
Event
13th International Conference on Solid-State Sensors, Actuators and Microsystems, Seoul, Korea, June 5-9, 2005
Organisational unit
03684 - Hierlemann, Andreas  
03263 - Baltes, Henry  
03684 - Hierlemann, Andreas  
Notes
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