Three-dimensional nanosprings for electromechanical sensors

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Author
Bell, D.J.
Sun, Y.
Zhang, L.
Dong, L.X.
Nelson, Bradley J.
Grützmacher, D.
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Date
2005
Type
  • Conference Paper
Publication status
published
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Book title
Digest of Technical Papers
Journal / series
Digest of Technical Papers
Volume
1
Pages
15 - 18
Publisher
IEEE Operations Center
Event
13th International Conference on Solid-State Sensors, Actuators and Microsystems, Seoul, South Korea, June 05-09, 2005
Subject
Nanofabrication; Microfabrication; Self-assembly; Nanospring; Electromechanical sensors; Nanomanipulation
Organisational unit
03627 - Nelson, Bradley J.
Notes
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