AutoSCIL 200mm tooling in production, x-ray optics and cell growth templates

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Author
Verschuuren, Marc A.
McCoy, Jake
Huber, Rebecca P.
van Brakel, Remco
Paans, Manuel
Voorkamp, Rob
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Date
2018
Type
    Conference Paper
Publication status
published
External links
Book title
Novel Patterning Technologies 2018
Journal / series
Proceedings of SPIE
Volume
10584
Pages / Article No.
105840Z
Publisher
SPIE
Event
Conference on Novel Patterning Technologies, San Jose, CA, USA, February 26 - March 1, 2018
Subject
soft nanoimprint; SCIL; x-ray optics; cell growth templates; overlay alignment; sol-gel resist
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yes
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