Design and fabrication of a gold electroplated electromagnetic and electrostatic hybrid MEMS relay

Metadata only

Author

Date

2005

Type

Conference Paper

ETH Bibliography

yes

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Publication status

published

External links

Journal / series

Journal of Applied Physics

Volume

97(10)

Pages / Article No.

10R506

Publisher

American Institute of Physics

Event

49th Annual Conference on Magnetism and Magnetic Materials, Jacksonville, FL, November 7-11, 2004

Organisational unit

03627 - Nelson, Bradley J. / Nelson, Bradley J.

Notes

Published online 17 May 2005.

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ETH Bibliography

yes

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Research Collection