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dc.contributor.author
Vollenweider, Kilian
dc.contributor.supervisor
Fichtner, Wolfgang
dc.contributor.supervisor
Pichler, Peter
dc.date.accessioned
2017-11-24T09:15:01Z
dc.date.available
2017-06-09T10:12:25Z
dc.date.available
2017-11-24T09:15:01Z
dc.date.issued
2010
dc.identifier.uri
http://hdl.handle.net/20.500.11850/32466
dc.identifier.doi
10.3929/ethz-a-006192842
dc.language.iso
en
en_US
dc.publisher
ETH
en_US
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.subject
DOTIERUNG (HALBLEITERTECHNOLOGIE)
en_US
dc.subject
DICHTEFUNKTIONALE (QUANTENCHEMIE U. QUANTENMECHANIK)
en_US
dc.subject
NUMERISCHE SIMULATION UND MATHEMATISCHE MODELLRECHNUNG
en_US
dc.subject
DIFFUSION (PHYSICS OF MOLECULAR SYSTEMS)
en_US
dc.subject
NUMERICAL SIMULATION AND MATHEMATICAL MODELING
en_US
dc.subject
SILICON (CHEMICAL ELEMENTS)
en_US
dc.subject
SILICIUM (CHEMISCHE ELEMENTE)
en_US
dc.subject
DENSITY FUNCTIONALS (QUANTUM CHEMISTRY AND QUANTUM MECHANICS)
en_US
dc.subject
DIFFUSION (PHYSIK VON MOLEKULARSYSTEMEN)
en_US
dc.subject
DOPING (SEMICONDUCTOR TECHNOLOGY)
en_US
dc.subject
CLUSTER (PHYSIK VON MOLEKULARSYSTEMEN)
en_US
dc.subject
CLUSTER (PHYSICS OF MOLECULAR SYSTEMS)
en_US
dc.title
Dopant clustering and diffusion in silicon
en_US
dc.type
Doctoral Thesis
dc.rights.license
In Copyright - Non-Commercial Use Permitted
ethz.size
91 p.
en_US
ethz.code.ddc
5 - Science::530 - Physics
en_US
ethz.identifier.diss
19255
en_US
ethz.identifier.nebis
006192842
ethz.publication.place
Zürich
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
03228 - Fichtner, Wolfgang
en_US
ethz.leitzahl.certified
03228 - Fichtner, Wolfgang
ethz.date.deposited
2017-06-09T10:12:28Z
ethz.source
ECOL
ethz.source
ECIT
ethz.identifier.importid
imp59366af42d93564801
ethz.identifier.importid
imp59364dd59e0bb87301
ethz.ecolpid
eth:1880
ethz.ecitpid
pub:53026
ethz.eth
yes
en_US
ethz.availability
Open access
en_US
ethz.rosetta.installDate
2017-08-01T16:08:42Z
ethz.rosetta.lastUpdated
2017-11-24T09:15:08Z
ethz.rosetta.exportRequired
false
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Dopant%20clustering%20and%20diffusion%20in%20silicon&rft.date=2010&rft.au=Vollenweider,%20Kilian&rft.genre=unknown&rft.btitle=Dopant%20clustering%20and%20diffusion%20in%20silicon
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