Electrodeposition of low residual stress CoNiMnP hard magnetic thin films for magnetic MEMS actuators
Metadata only
Date
2005-04Type
- Journal Article
Publication status
publishedJournal / series
Journal of Magnetism and Magnetic MaterialsVolume
Pages / Article No.
Publisher
ElsevierSubject
Electrodeposition; Residual stress; Hard magnetic materials; MEMSOrganisational unit
03627 - Nelson, Bradley J. / Nelson, Bradley J.
Notes
Received 20 May 2004, Revised 18 August 2004, Published online 10 November 2004.More
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