Towards a versatile DRIE
Silicon pit structures combined with electrochemical etch stop
Metadata only
Date
2005Type
- Conference Paper
Publication status
publishedExternal links
Book title
MEMS 2005 Miami, Technical digest: 18th IEEE International Conference on Micro Electro Mechanical SystemsPages / Article No.
Publisher
IEEE Service CenterEvent
Organisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas
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