Towards a versatile DRIE

Silicon pit structures combined with electrochemical etch stop
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Author
Kurzawski, P.
Salo, T.
Hierlemann, A.
Date
2005
Type
  • Conference Paper
Publication status
published
External links
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Book title
MEMS 2005 Miami, Technical digest: 18th IEEE International Conference on Micro Electro Mechanical Systems
Pages / Article No.
504 - 507
Publisher
IEEE Service Center
Event
18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Miami Beach, Florida, USA, January 30 - February 03, 2005
Organisational unit
03684 - Hierlemann, Andreas  
Notes
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Citations
Cited 1 times in Web of Science
ETH Bibliography
yes
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