Towards a versatile DRIE

Silicon pit structures combined with electrochemical etch stop
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Autor(in)
Kurzawski, P.
Salo, T.
Hierlemann, A.
Datum
2005
Typ
    Conference Paper
Publikationsstatus
published
Externe Links
Buchtitel
MEMS 2005 Miami, Technical digest: 18th IEEE International Conference on Micro Electro Mechanical Systems
Seiten / Artikelnummer
504 - 507
Verlag
IEEE Service Center
Konferenz
18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Miami Beach, Florida, USA, January 30 - February 03, 2005
Organisationseinheit
03684 - Hierlemann, Andreas / Hierlemann, Andreas  
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Zitate
1 Zitate in Web of Science
ETH Bibliographie
yes
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