Towards a versatile DRIE
Silicon pit structures combined with electrochemical etch stop
dc.contributor.author
Kurzawski, P.
dc.contributor.author
Salo, T.
dc.contributor.author
Hierlemann, A.
dc.date.accessioned
2017-06-09T10:28:32Z
dc.date.available
2017-06-09T10:28:32Z
dc.date.issued
2005
dc.identifier.isbn
0-7803-8732-5
dc.identifier.other
10.1109/MEMSYS.2005.1453977
dc.identifier.uri
http://hdl.handle.net/20.500.11850/33157
dc.language.iso
en
dc.publisher
IEEE Service Center
dc.title
Towards a versatile DRIE
dc.type
Conference Paper
ethz.title.subtitle
Silicon pit structures combined with electrochemical etch stop
ethz.book.title
MEMS 2005 Miami, Technical digest: 18th IEEE International Conference on Micro Electro Mechanical Systems
ethz.pages.start
504
ethz.pages.end
507
ethz.event
18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ethz.event.location
Miami Beach, Florida, USA
ethz.event.date
January 30 - February 03, 2005
ethz.identifier.wos
ethz.identifier.nebis
004997816
ethz.publication.place
Piscataway, NJ
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02060 - Dep. Biosysteme / Dep. of Biosystems Science and Eng.::03684 - Hierlemann, Andreas / Hierlemann, Andreas
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02060 - Dep. Biosysteme / Dep. of Biosystems Science and Eng.::03684 - Hierlemann, Andreas / Hierlemann, Andreas
ethz.date.deposited
2017-06-09T10:29:04Z
ethz.source
ECIT
ethz.identifier.importid
imp59364de42d9df99611
ethz.ecitpid
pub:53852
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-26T04:15:52Z
ethz.rosetta.lastUpdated
2018-10-01T12:20:08Z
ethz.rosetta.versionExported
true
ethz.COinS
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Conference Paper [33126]