Process optimization for dry etching of InP/InGaAsP-based photonic crystals with a Cl-2/CH4/H-2 mixture on an ICP-RIE

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Author

Date

2004

Type

Conference Paper

ETH Bibliography

yes

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Publication status

published

External links

Book title

Conference proceedings / 2004 International Conference on Indium Phosphide and Related Materials, 16th IPRM, May 31-June 4, 2004, Kagoshima, Japan

Pages / Article No.

175 - 178

Publisher

IEEE

Event

16th International Conference on Indium Phosphide and Related Materials, Kagoshima, Japan, May 31-June 4, 2004

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ETH Bibliography

yes

Altmetrics

Research Collection