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dc.contributor.author
Lemberger, Martin
dc.contributor.author
Paskaleva, Albena
dc.contributor.author
Zürcher, Stefan
dc.contributor.author
Bauer, Anton J.
dc.contributor.author
Frey, Lothar
dc.contributor.author
Ryssel, Heiner
dc.date.accessioned
2017-06-09T10:34:48Z
dc.date.available
2017-06-09T10:34:48Z
dc.date.issued
2005
dc.identifier.issn
0026-2714
dc.identifier.issn
1872-941X
dc.identifier.other
10.1016/j.microrel.2004.11.040
dc.identifier.uri
http://hdl.handle.net/20.500.11850/33458
dc.language.iso
en
dc.publisher
Elsevier
dc.title
Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor
dc.type
Conference Paper
ethz.journal.title
Microelectronics Reliability
ethz.journal.volume
45
ethz.journal.issue
5-6
ethz.journal.abbreviated
Microelectron. reliab.
ethz.pages.start
819
ethz.pages.end
822
ethz.event
13th Workshop on Dielectrics in Micoelectronics (WoDiM 2004)
ethz.event.location
Cork, Ireland
ethz.event.date
June 28-30, 2004
ethz.notes
Received 28 June 2004, Revised 3 September 2004, Available online 25 December 2004.
ethz.identifier.wos
ethz.identifier.nebis
001933457
ethz.publication.place
Kidlington, Oxford
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02160 - Dep. Materialwissenschaft / Dep. of Materials::02646 - Institut für Polymere / Institute of Polymers::03389 - Spencer, Nicholas / Spencer, Nicholas
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02160 - Dep. Materialwissenschaft / Dep. of Materials::02646 - Institut für Polymere / Institute of Polymers::03389 - Spencer, Nicholas / Spencer, Nicholas
ethz.date.deposited
2017-06-09T10:35:18Z
ethz.source
ECIT
ethz.identifier.importid
imp59364dea6e17099962
ethz.ecitpid
pub:54263
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-12T22:56:52Z
ethz.rosetta.lastUpdated
2018-10-01T12:23:55Z
ethz.rosetta.exportRequired
true
ethz.rosetta.versionExported
true
ethz.COinS
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