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dc.contributor.author
Sun, Yu
dc.contributor.author
Fry, Steven N.
dc.contributor.author
Potasek, D. P.
dc.contributor.author
Bell, Dominik J.
dc.contributor.author
Nelson, Bradley J.
dc.date.accessioned
2017-06-09T10:41:06Z
dc.date.available
2017-06-09T10:41:06Z
dc.date.issued
2005-02
dc.identifier.issn
1057-7157
dc.identifier.issn
1941-0158
dc.identifier.other
10.1109/JMEMS.2004.839028
dc.identifier.uri
http://hdl.handle.net/20.500.11850/33792
dc.language.iso
en
dc.publisher
IEEE
dc.subject
Capacitive sensor
dc.subject
Deep-reactive ion etching (DRIE) on silicon-on-insulator (SOI)
dc.subject
Dice free dry release
dc.subject
Differential triplate comb drive
dc.subject
Drosophila melanogaster
dc.subject
Fruit flies
dc.subject
High aspect ratio
dc.subject
Microforce sensing
dc.title
Characterizing fruit fly flight behavior using a microforce sensor with a new comb-drive configuration
dc.type
Journal Article
ethz.journal.title
Journal of microelectromechanical systems
ethz.journal.volume
14
ethz.journal.issue
1
ethz.pages.start
4
ethz.pages.end
11
ethz.notes
Received 25 November 2003, Revised 30 April 2004, Published online 7 February 2005.
ethz.identifier.wos
ethz.identifier.nebis
000643917
ethz.publication.place
New York
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02620 - Inst. f. Robotik u. Intelligente Systeme / Inst. Robotics and Intelligent Systems::03627 - Nelson, Bradley J. / Nelson, Bradley J.
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich, direkt::00012 - Lehre und Forschung, direkt::00007 - Departemente, direkt::02140 - Departement Informationstechnologie und Elektrotechnik / Department of Information Technology and Electrical Engineering::02533 - Institut für Neuroinformatik (INI) / Institute of Neuroinformatics (INI)::03454 - Martin, Kevan A.C.
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02620 - Inst. f. Robotik u. Intelligente Systeme / Inst. Robotics and Intelligent Systems::03627 - Nelson, Bradley J. / Nelson, Bradley J.
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich, direkt::00012 - Lehre und Forschung, direkt::00007 - Departemente, direkt::02140 - Departement Informationstechnologie und Elektrotechnik / Department of Information Technology and Electrical Engineering::02533 - Institut für Neuroinformatik (INI) / Institute of Neuroinformatics (INI)::03454 - Martin, Kevan A.C.
ethz.date.deposited
2017-06-09T10:41:24Z
ethz.source
ECIT
ethz.identifier.importid
imp59364df1a34ba56408
ethz.ecitpid
pub:54688
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-18T13:52:49Z
ethz.rosetta.lastUpdated
2018-10-01T12:28:16Z
ethz.rosetta.versionExported
true
ethz.COinS
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