Single-chip mechatronic microsystem for surface imaging and force response studies

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Author
Hafizovic, Sadik
Barrettino, Diego
Volden, Tormod
Sedivy, Jan
Kirstein, Kay-Uwe
Brand, Oliver
Hierlemann, A.
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Date
2004-12
Type
    Journal Article
Publication status
published
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Journal / series
Proceedings of the National Academy of Sciences of the United States of America
Volume
101(49)
Pages / Article No.
17011 - 17015
Publisher
National Academy of Sciences
Subject
Atomic force microscopy; Cantilever; Complementary metal oxide semiconductor
Organisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas  
Notes
Received 5 August 2004, Accepted 25 October 2004.
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Citations
Cited 28 times in Web of Science
ETH Bibliography
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