Single-chip mechatronic microsystem for surface imaging and force response studies
Metadata only
Date
2004-12Type
- Journal Article
Publication status
publishedExternal links
Journal / series
Proceedings of the National Academy of Sciences of the United States of AmericaVolume
Pages / Article No.
Publisher
National Academy of SciencesSubject
Atomic force microscopy; Cantilever; Complementary metal oxide semiconductorOrganisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas
Notes
Received 5 August 2004, Accepted 25 October 2004.More
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