A MEMS actuator for integrated carbon nanotube strain sensing

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Author
Jungen, Alain
Meder, Carsten
Tonteling, Marc
Stampfer, Christoph
Linderman, Ryan
Hierold, Christofer
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Date
2005
Type
  • Conference Paper
Publication status
published
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Book title
2005 IEEE Sensors : 30 October to 3 November 2005 , Irvine, CA
Pages / Article No.
93 - 96
Publisher
IEEE Operations Center
Event
4th IEEE Conference on Sensors, Irvine, CA, October 31 - November 3, 2005
Organisational unit
03609 - Hierold, Christofer  
Notes
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