Fabrication of a hard mask for InP based photonic crystals
Metadata only
Date
2005-11Type
- Conference Paper
Publication status
publishedJournal / series
Journal of vacuum science & technology. Series 2. BVolume
Pages
Publisher
American Institute of PhysicsEvent
Organisational unit
03386 - Jäckel, Heinz03262 - Bächtold, Werner
03472 - Professur für Feldtheorie (ehemalig)
Notes
Published online 7 December 2005.More
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