Monolithic CMOS multi-transducer gas sensor microsystem for organic and inorganic analytes

Metadata only

Author

Date

2007

Type

Journal Article

ETH Bibliography

yes

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Publication status

published

External links

Journal / series

Sensors and Actuators B: Chemical

Volume

126(2)

Pages / Article No.

431 - 440

Publisher

Elsevier

Subject

CMOS; Multi-transducer system; Gas sensor; Cantilever; Capacitor; Microhotplate; Polymer; Metal oxide

Organisational unit

03684 - Hierlemann, Andreas / Hierlemann, Andreas

Notes

Received 12 December 2006, Received in revised form 23 March 2007, Accepted 24 March 2007, Available online 5 April 2007.

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