Monolithic CMOS multi-transducer gas sensor microsystem for organic and inorganic analytes
Publication status
publishedExternal links
Journal / series
Sensors and Actuators B: ChemicalVolume
Pages / Article No.
Publisher
ElsevierSubject
CMOS; Multi-transducer system; Gas sensor; Cantilever; Capacitor; Microhotplate; Polymer; Metal oxideOrganisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas
Notes
Received 12 December 2006, Received in revised form 23 March 2007, Accepted 24 March 2007, Available online 5 April 2007.More
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ETH Bibliography
yes
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