Effects of Electrochemical Etching on InP HEMT Fabrication
Metadata only
Date
2019-11Type
- Journal Article
Publication status
publishedExternal links
Journal / series
IEEE Transactions on Semiconductor ManufacturingVolume
Pages / Article No.
Publisher
IEEESubject
High Electron Mobility Transistor (HEMT); Electrochemical Etching; Contact Resistance; Metal Lift-OffOrganisational unit
03721 - Bolognesi, Colombo / Bolognesi, Colombo
02205 - FIRST-Lab / FIRST Center for Micro- and Nanoscience
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