Effects of Electrochemical Etching on InP HEMT Fabrication
dc.contributor.author
Saranovac, Tamara
dc.contributor.author
Ruiz, Diego C.
dc.contributor.author
Han, Daxin
dc.contributor.author
Arabhavi, Akshay M.
dc.contributor.author
Ostinelli, Olivier
dc.contributor.author
Bolognesi, Colombo R.
dc.date.accessioned
2019-11-08T13:26:51Z
dc.date.available
2019-09-12T10:00:37Z
dc.date.available
2019-09-12T10:32:56Z
dc.date.available
2019-11-08T13:26:51Z
dc.date.issued
2019-11
dc.identifier.issn
0894-6507
dc.identifier.issn
1558-2345
dc.identifier.other
10.1109/tsm.2019.2940320
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/363700
dc.language.iso
en
en_US
dc.publisher
IEEE
en_US
dc.subject
High Electron Mobility Transistor (HEMT)
en_US
dc.subject
Electrochemical Etching
en_US
dc.subject
Contact Resistance
en_US
dc.subject
Metal Lift-Off
en_US
dc.title
Effects of Electrochemical Etching on InP HEMT Fabrication
en_US
dc.type
Journal Article
dc.date.published
2019-09-10
ethz.journal.title
IEEE Transactions on Semiconductor Manufacturing
ethz.journal.volume
32
en_US
ethz.journal.issue
4
en_US
ethz.pages.start
496
en_US
ethz.pages.end
501
en_US
ethz.identifier.wos
ethz.identifier.scopus
ethz.publication.place
New York, NY
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::03721 - Bolognesi, Colombo / Bolognesi, Colombo
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00003 - Schulleitung und Dienste::00022 - Bereich VP Forschung / Domain VP Research::02205 - FIRST-Lab / FIRST Center for Micro- and Nanoscience
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::03721 - Bolognesi, Colombo / Bolognesi, Colombo
en_US
ethz.date.deposited
2019-09-12T10:00:46Z
ethz.source
FORM
ethz.eth
yes
en_US
ethz.availability
Metadata only
en_US
ethz.rosetta.installDate
2020-02-15T22:26:30Z
ethz.rosetta.lastUpdated
2022-03-29T00:14:41Z
ethz.rosetta.versionExported
true
ethz.COinS
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