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dc.contributor.author
Saranovac, Tamara
dc.contributor.author
Ruiz, Diego C.
dc.contributor.author
Han, Daxin
dc.contributor.author
Arabhavi, Akshay M.
dc.contributor.author
Ostinelli, Olivier
dc.contributor.author
Bolognesi, Colombo R.
dc.date.accessioned
2019-11-08T13:26:51Z
dc.date.available
2019-09-12T10:00:37Z
dc.date.available
2019-09-12T10:32:56Z
dc.date.available
2019-11-08T13:26:51Z
dc.date.issued
2019-11
dc.identifier.issn
0894-6507
dc.identifier.issn
1558-2345
dc.identifier.other
10.1109/tsm.2019.2940320
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/363700
dc.language.iso
en
en_US
dc.publisher
IEEE
en_US
dc.subject
High Electron Mobility Transistor (HEMT)
en_US
dc.subject
Electrochemical Etching
en_US
dc.subject
Contact Resistance
en_US
dc.subject
Metal Lift-Off
en_US
dc.title
Effects of Electrochemical Etching on InP HEMT Fabrication
en_US
dc.type
Journal Article
dc.date.published
2019-09-10
ethz.journal.title
IEEE Transactions on Semiconductor Manufacturing
ethz.journal.volume
32
en_US
ethz.journal.issue
4
en_US
ethz.pages.start
496
en_US
ethz.pages.end
501
en_US
ethz.identifier.wos
ethz.identifier.scopus
ethz.publication.place
New York, NY
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::03721 - Bolognesi, Colombo / Bolognesi, Colombo
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00003 - Schulleitung und Dienste::00022 - Bereich VP Forschung / Domain VP Research::02205 - FIRST-Lab / FIRST Center for Micro- and Nanoscience
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::03721 - Bolognesi, Colombo / Bolognesi, Colombo
en_US
ethz.date.deposited
2019-09-12T10:00:46Z
ethz.source
FORM
ethz.eth
yes
en_US
ethz.availability
Metadata only
en_US
ethz.rosetta.installDate
2020-02-15T22:26:30Z
ethz.rosetta.lastUpdated
2022-03-29T00:14:41Z
ethz.rosetta.versionExported
true
ethz.COinS
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