Comparative study of ITO layers deposited by DC and RF magnetron sputtering at room temperature

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Author
Kurdesau, F.
Khripunov, G.
Cunha, A.F. da
Kaelin, M.
Tiwari, A.N.
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Date
2006
Type
  • Conference Paper
Publication status
published
External links
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Journal / series
Journal of non-crystalline solids
Volume
352(9-20)
Pages
1466 - 1470
Publisher
Elsevier
Event
21st International Conference on Amorphous and Nanocrystalline Semiconductors, Lisbon, Portugal, September 4-9, 2005
Subject
II-VI semiconductors; Photovoltaics; Indium tin oxide and other transparent conductors
Notes
Available online 20 March 2006.
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Citations
Cited 76 times in Web of Science
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