Comparative study of ITO layers deposited by DC and RF magnetron sputtering at room temperature

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Autor(in)
Kurdesau, F.
Khripunov, G.
Cunha, A.F. da
Kaelin, M.
Tiwari, A.N.
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Datum
2006
Typ
    Conference Paper
Publikationsstatus
published
Externe Links
Zeitschrift / Serie
Journal of Non-Crystalline Solids
Band
352(9-20)
Seiten / Artikelnummer
1466 - 1470
Verlag
Elsevier
Konferenz
21st International Conference on Amorphous and Nanocrystalline Semiconductors, Lisbon, Portugal, September 4-9, 2005
Thema
II-VI semiconductors; Photovoltaics; Indium tin oxide and other transparent conductors
Anmerkungen
Available online 20 March 2006.
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125 Zitate in Web of Science
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