Comparative study of ITO layers deposited by DC and RF magnetron sputtering at room temperature
dc.contributor.author
Kurdesau, F.
dc.contributor.author
Khripunov, G.
dc.contributor.author
Cunha, A.F. da
dc.contributor.author
Kaelin, M.
dc.contributor.author
Tiwari, A.N.
dc.date.accessioned
2017-06-09T11:39:02Z
dc.date.available
2017-06-09T11:39:02Z
dc.date.issued
2006
dc.identifier.issn
0022-3093
dc.identifier.issn
1873-4812
dc.identifier.other
10.1016/j.jnoncrysol.2005.11.088
dc.identifier.uri
http://hdl.handle.net/20.500.11850/36626
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
II-VI semiconductors
dc.subject
Photovoltaics
dc.subject
Indium tin oxide and other transparent conductors
dc.title
Comparative study of ITO layers deposited by DC and RF magnetron sputtering at room temperature
dc.type
Conference Paper
ethz.journal.title
Journal of Non-Crystalline Solids
ethz.journal.volume
352
ethz.journal.issue
9-20
ethz.journal.abbreviated
J. non-cryst. solids
ethz.pages.start
1466
ethz.pages.end
1470
ethz.event
21st International Conference on Amorphous and Nanocrystalline Semiconductors
ethz.event.location
Lisbon, Portugal
ethz.event.date
September 4-9, 2005
ethz.notes
Available online 20 March 2006.
ethz.identifier.wos
ethz.identifier.nebis
000049437
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.date.deposited
2017-06-09T11:39:08Z
ethz.source
ECIT
ethz.identifier.importid
imp59364e2958b0898581
ethz.ecitpid
pub:58484
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-15T15:11:42Z
ethz.rosetta.lastUpdated
2018-12-02T05:25:05Z
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Comparative%20study%20of%20ITO%20layers%20deposited%20by%20DC%20and%20RF%20magnetron%20sputtering%20at%20room%20temperature&rft.jtitle=Journal%20of%20Non-Crystalline%20Solids&rft.date=2006&rft.volume=352&rft.issue=9-20&rft.spage=1466&rft.epage=1470&rft.issn=0022-3093&1873-4812&rft.au=Kurdesau,%20F.&Khripunov,%20G.&Cunha,%20A.F.%20da&Kaelin,%20M.&Tiwari,%20A.N.&rft.genre=proceeding&rft_id=info:doi/10.1016/j.jnoncrysol.2005.11.088&
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