Fabrication of nanoporous silicon nitride and silicon oxide films of controlled size and porosity for combined electrochemical and waveguide measurements
- Journal Article
Journal / seriesNanotechnology
PublisherInstitute of Physics
Organisational unit03389 - Spencer, Nicholas
NotesReceived 25 February 2007, In final form 9 May 2007, Published 11 June 2007.
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