Fabrication of nanoporous silicon nitride and silicon oxide films of controlled size and porosity for combined electrochemical and waveguide measurements
- Journal Article
Journal / seriesNanotechnology
Pages / Article No.
PublisherInstitute of Physics
Organisational unit03389 - Spencer, Nicholas / Spencer, Nicholas
NotesReceived 25 February 2007, In final form 9 May 2007, Published 11 June 2007.
MoreShow all metadata