Efficiency of silicon micromachining by femtosecond laser pulses in ambient air - Research Collection

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Author

Hwang, David J.

Grigoropoulos, Costas P.

Choi, Tae Y.

Date

2006-04

Type

Journal Article

Citations

Cited 47 times in Web of Science

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1063/1.2187196

Journal / series

Journal of Applied Physics

Volume

99(8)

Pages / Article No.

083101

Publisher

American Institute of Physics

Notes

Received 21 September 2005, Accepted 7 February 2006, Published online 19 April 2006.

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Citations

Cited 47 times in Web of Science

ETH Bibliography

yes

Altmetrics