Efficiency of silicon micromachining by femtosecond laser pulses in ambient air
Metadata only
Date
2006-04Type
- Journal Article
Publication status
publishedExternal links
Journal / series
Journal of Applied PhysicsVolume
Pages / Article No.
Publisher
American Institute of PhysicsNotes
Received 21 September 2005, Accepted 7 February 2006, Published online 19 April 2006.More
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