Efficiency of silicon micromachining by femtosecond laser pulses in ambient air
Hwang, David J.
Grigoropoulos, Costas P.
Choi, Tae Y.
- Journal Article
Journal / seriesJournal of Applied Physics
Pages / Article No.
PublisherAmerican Institute of Physics
NotesReceived 21 September 2005, Accepted 7 February 2006, Published online 19 April 2006.
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