Validation of X-ray lithography and development simulation system for moving mask deep X-ray lithography
Korvink, Jan G.
- Journal Article
Journal / seriesJournal of microelectromechanical systems
Pages / Article No.
Subjectmicrofabrication; simulation; three-dimensional (3-D); X-ray lithography
NotesManuscript received 1 December 2004, Revised 29 March 2005.
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