- Journal Article
Journal / seriesJournal of microelectromechanical systems
Pages / Article No.
SubjectBottom-up and top-down design methodology; Complementary metal-oxide-semiconductor (CMOS); Fingerprint sensor; Microelectromechanical systems (MEMS); Multilevel; Response surface model (RSM); System performance
NotesManuscript received 25 March 2010, Revised 22 January 2011, Accepted 27 February 2011, Date of publication 11 May 2011, Date of current version 2 June 2011.
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