A microdevice with large deflection for variable-ratio RF MEMS power divider applications

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Author
Li, Y.
Kühne, S.
Psychogiou, D.
Hesselbarth, J.
Hierold, C.
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Date
2011
Type
  • Conference Paper
Publication status
published
External links
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Journal / series
Journal of Micromechanics and Microengineering
Volume
21(7)
Pages
074013
Publisher
Institute of Physics
Event
21st MicroMechanics Europe Workshop (MME 2010), Enschede, The Netherlands, September 26-29, 2010
Organisational unit
03609 - Hierold, Christofer
Notes
Received 10 January 2011, In final form 5 May 2011, Published online 22 June 2011.
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Citations
Cited 7 times in Web of Science
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