A microdevice with large deflection for variable-ratio RF MEMS power divider applications
- Conference Paper
Journal / seriesJournal of Micromechanics and Microengineering
Pages / Article No.
PublisherInstitute of Physics
Organisational unit03609 - Hierold, Christofer / Hierold, Christofer
NotesReceived 10 January 2011, In final form 5 May 2011, Published online 22 June 2011.
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