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dc.contributor.author
Hosseini, Nahid
dc.contributor.author
Neuenschwander, Matthias
dc.contributor.author
Peric, Oliver
dc.contributor.author
Andany, Santiago H.
dc.contributor.author
Adams, Jonathan D.
dc.contributor.author
Fantner, Georg E.
dc.date.accessioned
2020-01-23T10:36:43Z
dc.date.available
2020-01-01T18:41:44Z
dc.date.available
2020-01-23T10:36:43Z
dc.date.issued
2019-11-29
dc.identifier.issn
2190-4286
dc.identifier.other
10.3762/bjnano.10.226
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/387355
dc.identifier.doi
10.3929/ethz-b-000387355
dc.description.abstract
Employing polymer cantilevers has shown to outperform using their silicon or silicon nitride analogues concerning the imaging speed of atomic force microscopy (AFM) in tapping mode (intermittent contact mode with amplitude modulation) by up to one order of magnitude. However, tips of the cantilever made out of a polymer material do not meet the requirements for tip sharpness and durability. Combining the high imaging bandwidth of polymer cantilevers with making sharp and wear-resistant tips is essential for a future adoption of polymer cantilevers in routine AFM use. In this work, we have developed a batch fabrication process to integrate silicon nitride tips with an average tip radius of 9 ± 2 nm into high-speed SU8 cantilevers. Key aspects of the process are the mechanical anchoring of a moulded silicon nitride tip and a two-step release process. The fabrication recipe can be adjusted to any photo-processable polymer cantilever.
en_US
dc.format
application/pdf
en_US
dc.language.iso
en
en_US
dc.publisher
Beilstein-Institut zur Förderung der Chemischen Wissenschaften
en_US
dc.rights.uri
http://creativecommons.org/licenses/by/4.0/
dc.subject
Atomic force microscopy (AFM)
en_US
dc.subject
Durability
en_US
dc.subject
Imaging speed
en_US
dc.subject
Polymer cantilever
en_US
dc.subject
silicon nitride tip
en_US
dc.title
Integration of sharp silicon nitride tips into high-speed SU8 cantilevers in a batch fabrication process
en_US
dc.type
Journal Article
dc.rights.license
Creative Commons Attribution 4.0 International
ethz.journal.title
Beilstein Journal of Nanotechnology
ethz.journal.volume
10
en_US
ethz.journal.abbreviated
Beilstein j. nanotechnol.
ethz.pages.start
2357
en_US
ethz.pages.end
2363
en_US
ethz.version.deposit
publishedVersion
en_US
ethz.identifier.wos
ethz.publication.status
published
en_US
ethz.date.deposited
2020-01-01T18:41:47Z
ethz.source
WOS
ethz.eth
yes
en_US
ethz.availability
Open access
en_US
ethz.rosetta.installDate
2020-01-23T10:36:54Z
ethz.rosetta.lastUpdated
2021-02-15T07:37:22Z
ethz.rosetta.exportRequired
true
ethz.rosetta.versionExported
true
ethz.COinS
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