Determination of pull-off forces of textured silicon surfaces by AFM force curve analysis
- Journal Article
Journal / seriesJournal of Micromechanics and Microengineering
Pages / Article No.
Organisational unit03609 - Hierold, Christofer
NotesReceived 26 March 2007, In final form 11 May 2007, Published 5 June 2007.
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