Determination of pull-off forces of textured silicon surfaces by AFM force curve analysis

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Author
Bachmann, Daniel
Hierold, Christofer
Date
2007
Type
    Journal Article
Publication status
published
External links
Journal / series
Journal of Micromechanics and Microengineering
Volume
17(7)
Pages / Article No.
1326 - 1333
Publisher
IOP Publishing
Organisational unit
03609 - Hierold, Christofer / Hierold, Christofer  
Notes
Received 26 March 2007, In final form 11 May 2007, Published 5 June 2007.
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