Optically interrogated MEMS pressure sensor array

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Author
Prochazka, Lukas
Meier, Alexander H.
Viggiani, Antonio
Rösgen, Thomas
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Date
2012-04
Type
    Journal Article
Rights / license
In Copyright - Non-Commercial Use Permitted
Permanent link
https://doi.org/10.3929/ethz-b-000041613
Publication status
published
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Journal / series
Experiments in Fluids
Volume
52(4)
Pages / Article No.
1003 - 1015
Publisher
Springer
Organisational unit
03479 - Rösgen, Thomas / Rösgen, Thomas  
Notes
It was possible to publish this article open access thanks to a Swiss National Licence with the publisher
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Cited 1 times in Web of Science
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