Measurement of electrostatic tip–sample interactions by time-domain Kelvin probe force microscopy

Open access
Date
2020-06-15Type
- Journal Article
ETH Bibliography
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Abstract
Kelvin probe force microscopy is a scanning probe technique used to quantify the local electrostatic potential of a surface. In common implementations, the bias voltage between the tip and the sample is modulated. The resulting electrostatic force or force gradient is detected via lock-in techniques and canceled by adjusting the dc component of the tip–sample bias. This allows for an electrostatic characterization and simultaneously minimizes the electrostatic influence onto the topography measurement. However, a static contribution due to the bias modulation itself remains uncompensated, which can induce topographic height errors. Here, we demonstrate an alternative approach to find the surface potential without lock-in detection. Our method operates directly on the frequency-shift signal measured in frequency-modulated atomic force microscopy and continuously estimates the electrostatic influence due to the applied voltage modulation. This results in a continuous measurement of the local surface potential, the capacitance gradient, and the frequency shift induced by surface topography. In contrast to conventional techniques, the detection of the topography-induced frequency shift enables the compensation of all electrostatic influences, including the component arising from the bias modulation. This constitutes an important improvement over conventional techniques and paves the way for more reliable and accurate measurements of electrostatics and topography. Show more
Permanent link
https://doi.org/10.3929/ethz-b-000421087Publication status
publishedExternal links
Journal / series
Beilstein Journal of NanotechnologyVolume
Pages / Article No.
Publisher
Beilstein Institut zur Förderung der Chemischen WissenschaftenSubject
Atomic force microscopy (AFM); Electrostatic height error; Extended Kalman filter; Kelvin probe force microscopy (KFM); Time domainOrganisational unit
03444 - Stemmer, Andreas / Stemmer, Andreas
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ETH Bibliography
yes
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