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dc.contributor.author
Meroni, F. Favalli
dc.contributor.author
Mazza, E.
dc.date.accessioned
2020-06-25T11:25:50Z
dc.date.available
2020-06-25T11:25:50Z
dc.date.issued
2004
dc.identifier.issn
0946-7076
dc.identifier.issn
1432-1858
dc.identifier.other
10.1007/BF02637113
dc.identifier.uri
http://hdl.handle.net/20.500.11850/422889
dc.identifier.doi
10.3929/ethz-b-000422889
dc.format
application/pdf
dc.publisher
Springer
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.title
Fracture behaviour of single crystal silicon microstructures
dc.type
Journal Article
dc.rights.license
In Copyright - Non-Commercial Use Permitted
ethz.journal.title
Microsystem technologies
ethz.journal.volume
10
ethz.journal.issue
5
ethz.journal.abbreviated
Microsyst. technol.
ethz.pages.start
412
ethz.pages.end
418
ethz.version.deposit
publishedVersion
ethz.notes
It was possible to publish this article open access thanks to a Swiss National Licence with the publisher
ethz.publication.status
published
ethz.date.deposited
2020-06-25T11:25:50Z
ethz.source
springer
ethz.eth
yes
ethz.availability
Open access
ethz.rosetta.installDate
2020-06-29T10:15:19Z
ethz.rosetta.lastUpdated
2020-06-29T10:15:19Z
ethz.rosetta.versionExported
true
ethz.COinS
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