Effect of polymer thickness on the chemical sensing behavior of polymer-coated mass-sensitive disk resonators

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Author
Truax, S.
Demirci, K.S.
Beardslee, L.
Luzinova, Y.
Mizaikoff, B.
Hierlemann, Andreas
Brand, O.
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Date
2011
Type
  • Conference Paper
Publication status
published
External links
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Book title
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS 2011) : Cancun, Mexico, 23 - 27 January 2011
Pages / Article No.
853 - 856
Publisher
IEEE
Event
24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Cancun, Mexico, January 23-27, 2011
Organisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas  
Notes
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yes
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