Integration of clamped-clamped suspended single-walled carbon nanotubes into SOI MEMS

Metadata only

Author

Date

2011

Type

Conference Paper

ETH Bibliography

yes

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Publication status

published

External links

Book title

Proceedings of the 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Pages / Article No.

37 - 40

Publisher

IEEE

Event

The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2011), Kaohsiung, Taiwan, February 20-23, 2011

Organisational unit

03609 - Hierold, Christofer / Hierold, Christofer

Notes

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ETH Bibliography

yes

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Research Collection