Integration of clamped-clamped suspended single-walled carbon nanotubes into SOI MEMS

Thumbnail
Metadata only
Author
Lee, Shih-Wei
Muoth, Matthias
Durrer, Lukas
Roman, Cosmin
Hierold, Christofer
Show all
Date
2011
Type
  • Conference Paper
Publication status
published
External links
Search via SFX
Book title
Proceedings of the 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Pages / Article No.
37 - 40
Publisher
IEEE
Event
The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2011), Kaohsiung, Taiwan, February 20-23, 2011
Organisational unit
03609 - Hierold, Christofer / Hierold, Christofer  
Notes
.
More
Show all metadata
ETH Bibliography
yes
Altmetrics