Integration of clamped-clamped suspended single-walled carbon nanotubes into SOI MEMS
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Date
2011Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedExternal links
Book title
Proceedings of the 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular SystemsPages / Article No.
Publisher
IEEEEvent
Organisational unit
03609 - Hierold, Christofer / Hierold, Christofer
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ETH Bibliography
yes
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