Show simple item record

dc.contributor.author
Lee, Shih-Wei
dc.contributor.author
Muoth, Matthias
dc.contributor.author
Durrer, Lukas
dc.contributor.author
Roman, Cosmin
dc.contributor.author
Hierold, Christofer
dc.date.accessioned
2017-06-09T17:55:31Z
dc.date.available
2017-06-09T17:55:31Z
dc.date.issued
2011
dc.identifier.isbn
978-1-61284-775-7
dc.identifier.isbn
978-1-61284-777-1
dc.identifier.other
10.1109/NEMS.2011.6017289
dc.identifier.uri
http://hdl.handle.net/20.500.11850/42775
dc.language.iso
en
dc.publisher
IEEE
dc.title
Integration of clamped-clamped suspended single-walled carbon nanotubes into SOI MEMS
dc.type
Conference Paper
ethz.book.title
Proceedings of the 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
ethz.pages.start
37
ethz.pages.end
40
ethz.event
The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2011)
ethz.event.location
Kaohsiung, Taiwan
ethz.event.date
February 20-23, 2011
ethz.notes
.
ethz.publication.place
Piscataway, NJ
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
ethz.date.deposited
2017-06-09T17:56:00Z
ethz.source
ECIT
ethz.identifier.importid
imp59364ebfc333851774
ethz.ecitpid
pub:71070
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-18T11:42:11Z
ethz.rosetta.lastUpdated
2018-10-01T14:48:52Z
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Integration%20of%20clamped-clamped%20suspended%20single-walled%20carbon%20nanotubes%20into%20SOI%20MEMS&rft.date=2011&rft.spage=37&rft.epage=40&rft.au=Lee,%20Shih-Wei&Muoth,%20Matthias&Durrer,%20Lukas&Roman,%20Cosmin&Hierold,%20Christofer&rft.isbn=978-1-61284-775-7&978-1-61284-777-1&rft.genre=proceeding&rft_id=info:doi/978-1-61284-775-7&info:doi/978-1-61284-777-1&rft.btitle=Proceedings%20of%20the%202011%206th%20IEEE%20International%20Conference%20on%20Nano/Micro%20Engineered%20and%20Molecular%20Systems
 Search via SFX

Files in this item

FilesSizeFormatOpen in viewer

There are no files associated with this item.

Publication type

Show simple item record