Show simple item record

dc.contributor.author
Kaspar, Peter
dc.contributor.author
Fougner, Christopher
dc.contributor.author
Kappeler, Roman
dc.contributor.author
Jäckel, Heinz
dc.date.accessioned
2017-06-29T11:07:20Z
dc.date.available
2017-06-09T18:03:48Z
dc.date.available
2017-06-29T11:07:20Z
dc.date.issued
2012-02
dc.identifier.issn
1862-6351
dc.identifier.issn
1610-1634
dc.identifier.issn
1610-1642
dc.identifier.other
10.1002/pssc.201100223
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/43033
dc.language.iso
en
en_US
dc.publisher
Wiley
en_US
dc.subject
Dry-etching
en_US
dc.subject
Indium phosphide
en_US
dc.subject
Photonic crystal
en_US
dc.subject
High aspect ratio
en_US
dc.title
Limitations of Cl2/O2-based ICP-RIE of deep holes for planar photonic crystals in InP
en_US
dc.type
Journal Article
dc.date.published
2011-11-07
ethz.journal.title
Physica Status Solidi C
ethz.journal.volume
9
en_US
ethz.journal.issue
2
en_US
ethz.pages.start
239
en_US
ethz.pages.end
242
en_US
ethz.publication.place
Weinheim
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::02634 - Institut für Elektronik / Institute for Electronics::03388 - Tröster, Gerhard (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::02634 - Institut für Elektronik / Institute for Electronics::03388 - Tröster, Gerhard (emeritus)
ethz.leitzahl.certified
03386 - Jäckel, Heinz
ethz.date.deposited
2017-06-09T18:03:58Z
ethz.source
ECIT
ethz.identifier.importid
imp59364ec4abb2531678
ethz.ecitpid
pub:71527
ethz.eth
yes
en_US
ethz.availability
Metadata only
en_US
ethz.rosetta.installDate
2017-06-29T11:07:22Z
ethz.rosetta.lastUpdated
2020-02-15T06:03:44Z
ethz.rosetta.exportRequired
true
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Limitations%20of%20Cl2/O2-based%20ICP-RIE%20of%20deep%20holes%20for%20planar%20photonic%20crystals%20in%20InP&rft.jtitle=Physica%20Status%20Solidi%20C&rft.date=2012-02&rft.volume=9&rft.issue=2&rft.spage=239&rft.epage=242&rft.issn=1862-6351&1610-1634&1610-1642&rft.au=Kaspar,%20Peter&Fougner,%20Christopher&Kappeler,%20Roman&J%C3%A4ckel,%20Heinz&rft.genre=article&
 Search via SFX

Files in this item

FilesSizeFormatOpen in viewer

There are no files associated with this item.

Publication type

Show simple item record