High brightness EUV source for EUVL applications
dc.contributor.author
Morris, Oran
dc.contributor.author
Abhari, Reza S.
dc.date.accessioned
2017-06-09T18:26:14Z
dc.date.available
2017-06-09T18:26:14Z
dc.date.issued
2011
dc.identifier.uri
http://hdl.handle.net/20.500.11850/44164
dc.language.iso
en
dc.publisher
2011 International Workshop on EUV and Soft X-ray Sources
dc.title
High brightness EUV source for EUVL applications
dc.type
Other Conference Item
ethz.event
2011 International Workshop on EUV and Soft X-ray Sources
ethz.event.location
Dublin, Ireland
ethz.event.date
November 7-11, 2011
ethz.notes
Conference lecture on 8 November 2011.
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02668 - Inst. f. Energie- und Verfahrenstechnik / Inst. Energy and Process Engineering::03548 - Abhari, Reza S. / Abhari, Reza S.
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02668 - Inst. f. Energie- und Verfahrenstechnik / Inst. Energy and Process Engineering::03548 - Abhari, Reza S. / Abhari, Reza S.
ethz.date.deposited
2017-06-09T18:26:39Z
ethz.source
ECIT
ethz.identifier.importid
imp59364ed631de236249
ethz.ecitpid
pub:72958
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-12T12:05:52Z
ethz.rosetta.lastUpdated
2021-02-14T08:22:29Z
ethz.rosetta.versionExported
true
ethz.COinS
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Other Conference Item [19340]