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dc.contributor.author
Josell, Daniel
dc.contributor.author
Shi, Zhitian
dc.contributor.author
Jefimovs, Konstantins
dc.contributor.author
Romano, Lucia
dc.contributor.author
Vila-Comamala, Joan
dc.contributor.author
Moffat, Thomas P.
dc.date.accessioned
2020-11-17T11:17:42Z
dc.date.available
2020-10-21T02:48:43Z
dc.date.available
2020-10-22T11:26:46Z
dc.date.available
2020-11-17T11:17:42Z
dc.date.issued
2020-09
dc.identifier.issn
0013-4651
dc.identifier.issn
1945-7111
dc.identifier.other
10.1149/1945-7111/abba63
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/446923
dc.description.abstract
The application of superconformal Bi-catalyzed Au electrodeposition for void-free filling of recessed trenches in X-ray gratings used in phase contrast imaging is detailed. Filling of trenches with aspect ratio (height divided by width) up to 55 is demonstrated. Uniform bottom-up filling of patterned trench arrays across 100 mm (4 inch) diameter Si wafer is accomplished using a well-defined hydrodynamic flow field across the wafer surface. The filling process and microstructure are examined by scanning electron microscopy of cross-sectioned specimens. The importance of process optimization, from the design of potential (current) programming to electrolyte pH and concentrations of Na3Au(SO3)2 and Bi3+, for the filling of high aspect ratio trenches is demonstrated. X-ray phase contrast imaging is used to assay the quality and uniformity of the as-formed gratings as well as demonstrate their application to imaging biological tissue. Successful void-free Au filling of micrometer range pitch, high aspect ratio trenches in Si gratings promises to advance X-ray grating interferometry and its application to X-ray phase contrast imaging. © 2020 The Electrochemical Society.
en_US
dc.language.iso
en
en_US
dc.publisher
The Electrochemical Society
en_US
dc.title
Pushing the limits of bottom-up gold filling for x-ray grating interferometry
en_US
dc.type
Journal Article
dc.date.published
2020-09-21
ethz.journal.title
Journal of the Electrochemical Society
ethz.journal.volume
167
en_US
ethz.journal.issue
13
en_US
ethz.journal.abbreviated
J. Electrochem. Soc.
ethz.pages.start
132504
en_US
ethz.size
13 p.
en_US
ethz.grant
X-ray phase-contrast micro computed tomography for improved pathology
en_US
ethz.grant
Metal Assisted chemical etching of Gratings for x-ray InterferometriC systems
en_US
ethz.grant
Phase contrast X-ray imaging for medicine
en_US
ethz.identifier.wos
ethz.identifier.scopus
ethz.publication.place
Pennington, NJ
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::02631 - Institut für Biomedizinische Technik / Institute for Biomedical Engineering::03817 - Stampanoni, Marco F.M. / Stampanoni, Marco F.M.
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::02631 - Institut für Biomedizinische Technik / Institute for Biomedical Engineering::03817 - Stampanoni, Marco F.M. / Stampanoni, Marco F.M.
ethz.grant.agreementno
159263
ethz.grant.agreementno
727246
ethz.grant.agreementno
310005
ethz.grant.fundername
SNF
ethz.grant.fundername
EC
ethz.grant.fundername
EC
ethz.grant.funderDoi
10.13039/501100001711
ethz.grant.funderDoi
10.13039/501100000780
ethz.grant.funderDoi
10.13039/501100000780
ethz.grant.program
H2020
ethz.grant.program
FP7
ethz.grant.program
Interdisziplinäres Projekt
ethz.date.deposited
2020-10-21T02:48:50Z
ethz.source
SCOPUS
ethz.eth
yes
en_US
ethz.availability
Metadata only
en_US
ethz.rosetta.installDate
2020-10-22T11:26:58Z
ethz.rosetta.lastUpdated
2024-02-02T12:29:56Z
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Pushing%20the%20limits%20of%20bottom-up%20gold%20filling%20for%20x-ray%20grating%20interferometry&rft.jtitle=Journal%20of%20the%20Electrochemical%20Society&rft.date=2020-09&rft.volume=167&rft.issue=13&rft.spage=132504&rft.issn=0013-4651&1945-7111&rft.au=Josell,%20Daniel&Shi,%20Zhitian&Jefimovs,%20Konstantins&Romano,%20Lucia&Vila-Comamala,%20Joan&rft.genre=article&rft_id=info:doi/10.1149/1945-7111/abba63&
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