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dc.contributor.author
Bryner, Juerg
dc.contributor.author
Vollmann, Jacqueline
dc.contributor.author
Aebi, Laurent
dc.contributor.author
Dual, Jürg
dc.contributor.author
Kehoe, Timothy
dc.contributor.author
Torres, Clivia S.
dc.date.accessioned
2020-09-21T11:14:10Z
dc.date.available
2017-06-08T16:36:34Z
dc.date.available
2020-09-21T11:14:10Z
dc.date.issued
2007
dc.identifier.isbn
978-1-4244-1383-6
en_US
dc.identifier.isbn
978-1-4244-1384-3
en_US
dc.identifier.other
10.1109/ULTSYM.2007.354
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/4475
dc.description.abstract
A laser acoustic setup is used to determine mechanical properties of polymer thin films which are used for nanoimprinting. Until now mechanical properties like the Young's Modulus or the Poisson Ratio are not well known for these polymers in such small dimensions (100 - 600 nm thickness). The polymer films are spincoated on a silicon wafer and covered with a thin aluminum layer for a better energy absorption of the laser pulses. The measurements are performed on a femtosecond laser pump- probe setup with a collinear beam guidance. This measurement method is contact-free and non-destructive. Mechanical waves are excited and detected thermoelastically using infrared laser pulses of approximately 80 fs duration. The entire experimental setup is simulated numerically: The heat distribution and wave excitation in the thin films caused by the laser pulse, the wave propagation, and the photoacoustic detection. Results of the simulation are shown and a short overview of the simulation procedure is given. With the simulation it is possible to interpret and assign the various measured wave pulses. The laser acoustic measurements are compared with profilometry measurements performed on the same thin film structures in order to quantify the mechanical properties of the polymer films.
en_US
dc.language.iso
en
en_US
dc.publisher
IEEE
en_US
dc.title
Characterization of nanoimprinting polymer films using picosecond ultrasonics
en_US
dc.type
Conference Paper
dc.date.published
2007-12-26
ethz.book.title
2007 IEEE International Ultrasonics Symposium Proceedings
en_US
ethz.journal.volume
3
en_US
ethz.pages.start
1409
en_US
ethz.pages.end
1412
en_US
ethz.event
2007 IEEE Ultrasonics Symposium (IUS 2007)
en_US
ethz.event.location
New York, NY, USA
en_US
ethz.event.date
October 28-31, 2007
en_US
ethz.publication.place
Piscataway, NJ
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02618 - Institut für Mechanische Systeme / Institute of Mechanical Systems::03307 - Dual, Jürg / Dual, Jürg
en_US
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02618 - Institut für Mechanische Systeme / Institute of Mechanical Systems::03307 - Dual, Jürg / Dual, Jürg
ethz.date.deposited
2017-06-08T16:36:42Z
ethz.source
ECIT
ethz.identifier.importid
imp59364b7a85a6d29816
ethz.ecitpid
pub:14621
ethz.eth
yes
en_US
ethz.availability
Metadata only
en_US
ethz.rosetta.installDate
2017-07-14T16:35:11Z
ethz.rosetta.lastUpdated
2018-10-01T04:18:07Z
ethz.rosetta.exportRequired
true
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Characterization%20of%20nanoimprinting%20polymer%20films%20using%20picosecond%20ultrasonics&rft.date=2007&rft.volume=3&rft.spage=1409&rft.epage=1412&rft.au=Bryner,%20Juerg&Vollmann,%20Jacqueline&Aebi,%20Laurent&Dual,%20J%C3%BCrg&Kehoe,%20Timothy&rft.isbn=978-1-4244-1383-6&978-1-4244-1384-3&rft.genre=proceeding&rft_id=info:doi/978-1-4244-1383-6&info:doi/978-1-4244-1384-3&rft.btitle=2007%20IEEE%20International%20Ultrasonics%20Symposium%20Proceedings
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