Next generation secondary electron detector with energy analysis capability for SEM

Abstract

We report the working of a novel detector design based on a Bessel Box (BB) electron energy analyser in a scanning electron microscope (SEM). We demonstrate the application of our detector for elemental identification through Auger electron detection in an SEM environment and its potential as a complementary technique to energy dispersive X‐ray (EDX) spectroscopy. We also demonstrate energy‐filtered secondary electron imaging of a copper‐on‐silicon sample using an electron pass energy of 12 eV.